Methods for description of microelectro-mechanical device models for system-level simulation

摘要

Behavioural simulators and their modelling languages, so-called hardware description languages (HDL) enable simulation of electromechanical and other mixed-domain systems. For modelling of microelectromechanical devices, partial differential equations (PDE) are often necessary. They are not directly supported by HDLs, but can be described by some method of discretization. We have proven that simple, yet effectve finite difference method can enable modelling of complex microelectromechanical devices. Our recent experiments have shown that finite element method is even better suited for application in a HDL.