The effect of a periodic movement on the die of the bottom line of the melt/gas meniscus in the case of silicon filaments grown from the melt in a vacuum by edge-defined film-fed growth method

摘要

In this paper the model which describes the evolution of the filament radius r=r(t) and the meniscus height h=h(t) in the case of filaments grown from the melt by E.F.G. method is that presented in [1, 2] but the bottom line of the melt/gas meniscus on the die is considered movable ([3]). The effect of a periodic movement on the die of the bottom line of the melt/gas meniscus is investigated. The main objective is to show that a periodic movement of the bottom line during the growth leads to a periodic change of the crystal width (as is suggested in [4]) and it is possible to compensate this effect, for example by an adequate periodic variation of the pulling rate.