Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives

摘要

This paper reports the first design and its simulation and experimental results of a CMOS z-axis microactuator that utilizes the vertical electrostatic forces existing between multi-conductor comb fingers. The measured maximum displacement of the z-axis microactuator is 3.5 μm, and resonant frequency 6.17 kHz, which are in good agreement with the field simulation and the behavioral simulation results using the NODAS library. The advantages of the z-axis actuator include compatibility with standard CMOS processes and easy implementation of 3-axis microstages, integrated position sensing components and motion control circuits.