Simulation of Vibratory Micromachined Gyroscope with Fence Structure

摘要

An equivalent circuit model of a novel fence structure vibratory micromachined gyroscope's oscillating properties is derived according to its dynamics equation. Equivalent circuit model of oscillating and differential detection capacitance model are implemented in the circuit simulation tool PSPICE, which is available in oscillating properties analysis which consist of detection oscillating's transient response, steady response and frequency response to angular rate to optimize working mode of the gyroscope. The model also enables the sensor simulation with the interfacing electronics to analyze the whole performances of the system and optimize design of testing circuits.