We present a novel bar structure vibratory micromachined gyroscope, which is actuated electrostatically and sensed capacitively at atmospheric pressure. The motion equations are presented and modelled by electrical equivalent circuits. The differential detection capacitance model and equivalent circuit model of the oscillating proof mass constitute the equivalent electrical model of gyroscope, which is implemented in the circuit simulation tool, PSPICE. The model also enables sensor simulation with the interfacing electronics to analyse the performances of the whole system and to optimize the design of the testing circuits. According to the model, a behavioural simulation of the system is performed. The simple performances of the gyroscope are tested using designed circuits. The measurement results show that the gyroscope has a good sensitivity and linear response at atmospheric pressure. The scale factor and nonlinearity of the gyroscope are 20 mV/degrees/s and 0.56%, respectively. [References: 9]
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