A Micromachined Piezoresistive High-g Accelerometer with High Sensitivity and Wide Frequency-Band: Design and Modeling

摘要

A high-g, micromachined piezoresistive accelerometer, which can increase the sensor's frequency-band while maintaining a high sensitivity is presented and modeled here. A simplified analytical model is established to describe the accelerometer's performance. Results of the analytical model shows good agreement with the finite element modeling. At last, the configuration of the accelerometer was optimized.