ANNEALING EFFECTS ON THE STRUCTURE AND LUMINOUS PROPERTIES OF THIN FILM PHOSPHORS

摘要

ZnGa_20_4:Mn and CaTi0_3: Pr thin film phosphors were prepared by rf magnetron reactive sputtering method. And then the relation between the structure and luminous properties by annealing was characterized. To observe the effects of the annealing conditions, thin films were heat-treated in vacuum, N_2 and air circumstance. By heat treatment, PL intensity increased, because it eliminated the defects in films and improved the crystallinity. Also, the atomic composition and the structural evolution depended on the annealing conditions.