Three-dimensional reconstruction of surfaces with steep slopes using an optical measurement system based on a colour focus sensor

摘要

The accurate three-dimensional measurement of microscopic technical surfaces with steep slopes is a demanding task in surface metrology. In this paper we demonstrate that the optical measurement device InfiniteFocus by Alicona Imaging is capable of reconstructing surfaces with slope angles more than 80°. We demonstrate this using three micro-contour artefacts of the PTB (Physikalisch Technische Bundesanstalt, Braunschweig, Germany) and show a comparison of the measurements between the PTB and the InfiniteFocus system.