Computational Study on Fundamental Properties of CF_4/N_2 Plasmas and Application of Impulse-Field Electron Acceleration to CF_4 Decomposition

摘要

Properties of CF_4/N_2 RF plasmas have been investigated using a one-dimensional fluid model and their response to impulse electric field has been simulated to evaluate the applicability of the impulse-field electron acceleration (IFEA) technique to improvement of the efficiency of CF_4 decomposition. The aim of the IFEA method and preliminary simulation results are presented.