Detection and Compensation of Motion Error for Nanomanipulation Platform in Scanning Electron Microscope

摘要

Nanomanipulation system based on scanning electron microscope(SEM) with good real-time visual feedback and nanoscale observation resolution had high operability in a vacuum working environment. Different nanomanipulation tasks of carbon nanotubes (CNTs) are carried out through the nanomanipulation system in SEM. Nanomanipulation platform existed inherent manufacture errors, installation errors and other errors, and imprecise nanomanipulation system were also time-consuming and laborious for operators. This paper presentes a method of combining the visual feedback and feedforward control to detect and compensate the motion error of the multi-dimensional SmarAct nanomanipulation platform in the nanomanipulation system in SEM. This method reduces the motion error in the X-Y direction and achieved higher operating accuracy. At the different step speed, the motion error in the X direction and Y direction is 135.7nm and 112.9nm respectively. After the feedforward compensation, the motion error in the X direction and Y direction reduces to 61.3nm and 54.1nm respectively.