ELECTRON BEAM DETECTION METHOD, ELECTRON BEAM DETECTION METHOD FOR SCANNING TYPE ELECTRON MICROSCOPE, DIMENSION CALIBRATION METHOD FOR SCANNING TYPE ELECTRON MICROSCOPE, AND DIMENSION CALIBRATION DEVICE FOR ELECTRON BEAM DETECTION DEVICE AND SCANNING TYPE ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a dimension calibration method with low dispersion for a scanning type microscope. SOLUTION: A switching element which is equipped with a gate electrode 12 whose stripe shape is exposed in the top view, and is also equipped with a MOS FET structure permitting source drain current to start flowing with switching operated upon irradiating an electron beam onto the aforesaid gate electrode 12, is rested over the specimen table of a scanning type electron microscope, and the source drain current of the switching element 10 is thereby detected. By this constitution, the scanning time is thereby measured from the time when the gate electrode 12 is canned once by an electron beam till the time when the gate electrode 12 is scanned again next time by the electron beam.