Design and Analysis of a Capacitive MEMS Ring Wave Gyroscope with High-Overload

摘要

This study presents a MEMS ring wave gyroscope with capacitive electrodes. It focus on structural design and simulation analysis of MEMS ring wave gyroscope with high-overload. A perfect symmetric ring-shaped sensing structure with eight S-shaped symmetrical supporting springs is developed firstly. The modal analysis results demonstrate that the natural frequencies of the drive mode and sense mode of the gyroscope are 9. 2900kHz and 9. 2909kHz respectively. Frequency response analysis shows that the drive mode or sense mode is only excited in driving force, moreover, the analysis of displacement load and temperature load shows that this structure is reasonable and feasible. More importantly, when the gyroscope is subjected to 10000g transient acceleration impact, which can survive high-overload and then maintains the level of performance required. The discussions and conclusions in this paper will be used in developing the design, analysis and manufacture of the high-overload gyroscope.