Capacitive MEMS device, capacitive MEMS transducer, method for forming a capacitive MEMS device and method for operating a capacitive MEMS device

摘要

A capacitive MEMS device comprises a first electrode structure having a first conductive layer and a second electrode structure having a second conductive layer, the second conductive layer at least partially facing the first conductive layer, the first conductive layer having a multiple segmentation which provides electrical isolation between at least three portions of the first conductive layer.