Modeling of an electron beam generated Ar-N2 Plasma for plasma processing

摘要

A spatially averaged model of an electron beam generated plasma immersed in a constant magnetic field is developed to model the impact of small admixture of nitrogen to an argon background on the development of the electron energy distributions function. The model is based on numerical solution of the electron Boltzmann equation self consistently coupled to a set of rate balance equations for electrons, argon and nitrogen species. The electron energy distribution function, electron density and temperature are calculated as a function of the fraction of nitrogen in the gas and compared to experimentally measured data.