Pulling out the electron beam from the metal target and this laser plasma which generate the laser plasma the electron beam drawing device which uses the electron beam lighting device

摘要

PROBLEM TO BE SOLVED: To provide an electron beam high in brightness and low in emittance by providing a target for generating a laser plasma with radiation of pulse laser and an acceleration electrode for drawing the electron beam from laser plasma and accelerating it. ;SOLUTION: Pulse lasers 29 are ejected from a pulse laser device 32, are collected at a lens 31, enter a vacuum container 22 through a laser incident window 30, and are radiated to a metal target 23. Atoms in the metal target 23 are emitted from a surface by abrasion, and laser plasmas 34 high in density are generated. The laser plasmas 34 hardly dissipate after pulse time width of the pulse lasers 29, expand and diffuse. A boundary surface of the laser plasmas 34 reaching near a grid 25 outgoes as a surface shape so as to be bundled electron beams 35 for the outgoing direction using a voltage applied between the grid 25 and an acceleration electrode 26 by an acceleration power supply device 27, and electron beams of large-current and high density synchronous with the pulse lasers.;COPYRIGHT: (C)2000,JPO