Novel reactive species environment created by microplasma jet arrays in combination with a controlled gas feed system

摘要

Summary form only given. Radicals and excited species produced through mixing low temperature plasma with a surrounding gas medium can be tailored so as to promote a process of benefit to either medical therapeutics or materials fabrication. This mixing process is particular interesting when the plasma is generated from an array of microplasma jets.Here, we report the interaction of an array of 25 microplasma jets with an atmosphere whose composition can be controlled at will. Helium serves as the feedstock gas for the microplasma jet array and the breakdown cross section area voltage is ~1 kV (RMS) for a sinusoidal driving voltage frequency of 20 kHz. An environment rich in reactive oxygen species (ROS) and reactive nitrogen species (RNS) has been developed in afterglow region immediately adjacent to the plasma jet apparatus by appropriate control of the ratio of the secondary input gases, including O2, N2, Ar, NH3, and their mixtures. Selective production of the targeted radicals is measured by optical emission spectroscopy, mass spectrometry, and Fourier transform infrared spectroscopy (FTIR). The characteristics and control of ROS and RNS within the region surrounding each jet apertures with various gases and operational parameters will be discussed.