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Error analysis for a piezoelectric ceramic-actuated and flexure hinge-based micromanipulator

机译:压电陶瓷驱动挠曲铰链微操纵器的误差分析

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Flexure hinges manufacturing error and hysteresis nonlinearity of piezoelectric actuator are two key factors that affect control precision of micromanipulator. In order to evaluate error affects on micromanipulator accuracy, a partial differentiation error model of manufacturing error was presented. And the flexure hinges hole radius error, cross-sectional width error and minimum thickness error were respectively modeled; besides, we used finite element simulation to validate the analytical error model. The analytical and simulation result shows that the analytical error model is correct, and minimum thickness error induces biggest displacement precision error. In addition, the nonlinear error of piezoelectric actuator was considered, and support vector machine for regression (SVR) was used to model hysteresis nonlinearity. The experiment results show that SVR nonlinear model can accurately describe the nonlinear error. The obtained error model and data are used to establish a theoretical limit for the design and precision control of micromanipulator.
机译:挠性铰链的制造误差和压电执行器的滞后非线性是影响微操纵器控制精度的两个关键因素。为了评估误差对微操纵器精度的影响,提出了制造误差的偏微分误差模型。分别模拟了挠性铰链孔半径误差,截面宽度误差和最小厚度误差。此外,我们使用有限元模拟来验证分析误差模型。分析和仿真结果表明,分析误差模型是正确的,最小厚度误差引起最大位移精度误差。此外,考虑了压电致动器的非线性误差,并使用了支持向量机回归(SVR)来模拟磁滞非线性。实验结果表明,SVR非线性模型可以准确地描述非线性误差。所获得的误差模型和数据被用来为微操纵器的设计和精度控制建立理论极限。

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