Preparation and Film-Substrate Stress Analysis Of CVD Diamond Film Coating Tools

摘要

The diamond thin films was deposited by hot filament CVD method in the Cemented Carbide (YG6) substrate.The surface morphology and quality of the diamond film coating was detected by scanning electron microscopy and Raman spectrometer.The internal stress of the diamond thin films and Cemented Carbide substrate,exerted by load,was calculated by the method of finite element numerical analysis.The analysis result shows that the internal stress of the film is tensile stress.The maximum appear in the blade and the tip place,the stress distribution more evenly in the middle area of the film.The stress is a zonal distribution and reduced gradually from the matrix surface to bottom in the Cemented Carbide,the resuhs of the finite element analysis can provide the reference for the other methods to determin the diamond film stress and improve the stress between the membrane and substrate.