A 3D tomographic EBSD analysis of a CVD diamond thin film

机译：CVD金刚石薄膜的3D断层扫描EBSD分析

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摘要

We have studied the nucleation and growth processes in a chemical vapor deposition (CVD) diamond film using a tomographic electron backscattering diffraction method (3D EBSD). The approach is based on the combination of a focused ion beam (FIB) unit for serial sectioning in conjunction with high-resolution EBSD. Individual diamond grains were investigated in 3-dimensions particularly with regard to the role of twinning.

机译：我们已经使用层析电子背散射衍射方法（3D EBSD）研究了化学气相沉积（CVD）金刚石膜中的成核和生长过程。该方法基于聚焦离子束（FIB）单元与高分辨率EBSD的结合，用于连续切片。研究了单个钻石晶粒的三维尺寸，特别是关于孪晶的作用。

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期刊名称 Science and Technology of Advanced Materials
作者
Tao Liu; Dierk Raabe; Stefan Zaefferer;
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作者单位

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年(卷),期 2008(9),3
年度 2008
页码 035013
总页数 6
原文格式 PDF
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中图分类
关键词
CVD diamond films nucleation growth twinning dislocation density 3D EBSD FIB;

机译：CVD金刚石膜;成核;生长;孪晶;位错密度;3D EBSD;FIB;

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专利

1. A 3D tomographic EBSD analysis of a CVD diamond thin film [J] . Science and technology of advanced materials . 2008,第3期

机译：CVD金刚石薄膜的3D断层扫描EBSD分析
2. In-depth analysis of impurities in HFCVD diamond thin films grown from acetone/hydrogen mixtures [J] . M.Roy, V.C.George, A.K.Dia Diamond and Related Materials . 2003,第9期

机译：深入分析由丙酮/氢混合物形成的HFCVD金刚石薄膜中的杂质
3. The effect of CVD-diamond film thickness on the electrochemical properties of synthetic diamond thin-film electrodes [J] . Krotova M. D., Pleskov Yu. V., Varnin V. P., Journal of Applied Electrochemistry . 2010,第10期

机译：CVD金刚石膜厚度对合成金刚石薄膜电极电化学性能的影响
4. Low temperature DC plasma CVD diamond and diamond-like carbon thin films [C] . Ramos, H.J., Malapit, . 2003

机译：低温直流等离子体CVD金刚石和类金刚石碳薄膜
5. Synthesis of thin and thick ultra-nanocrystalline diamond films by microwave plasma CVD system. [D] . Tran, Dzung Tri. 2005

机译：微波等离子体CVD系统合成薄而厚的超纳米金刚石薄膜。
6. ToF-SIMS 3D Analysis of Thin Films Deposited in High Aspect Ratio Structures via Atomic Layer Deposition and Chemical Vapor Deposition [O] . Alireza M. Kia, Nora Haufe, Sajjad Esmaeili, 2019

机译：通过原子层沉积和化学气相沉积在高纵横比结构中沉积的薄膜的ToF-SIMS 3D分析
7. A 3D tomographic EBSD analysis of a CVD diamond thin film [O] . Tao Liu, Dierk Raabe, Stefan Zaefferer 2008

机译：CVD钻石薄膜的3D断层摄影EBSD分析
8. STM and AFM of CVD-diamond and diamond-like carbon thin films [R] . Mercer, T. W. , Carroll, D. L. , Liang, Y. , 1994

机译：CVD-金刚石和类金刚石碳薄膜的sTm和aFm

A 3D tomographic EBSD analysis of a CVD diamond thin film

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