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Pockels effect and optical rectification induced by the built-in electric field in the space charge regions of surface layers of silicon crystals

机译:内置电场在硅晶体表面层空间电荷区中产生的普克尔效应和光整流

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摘要

In this paper, electric field induced Pockels effect and optical rectification were demonstrated in the space charge regions of surface layers of (001)- and (HO)-cut silicon crystals. The Pockels signals were much larger than the Kerr signals. These effects were considerable that they should be taken into account when designing silicon devices. Dependence of the optical rectification on various depth of the silicon crystal was investigated which could be used as a simple and nondestructive method to detect distribution of electric field of silicon devices.
机译:在本文中,在(001)-和(HO)-切割的硅晶体的表面层的空间电荷区域中证明了电场诱导的普克尔斯效应和光学整流。 Pockels信号比Kerr信号大得多。这些影响是巨大的,因此在设计硅器件时应将它们考虑在内。研究了光学整流对硅晶体不同深度的依赖性,可以将其用作检测硅器件电场分布的一种简单而无损的方法。

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  • 来源
  • 会议地点 Beijing(CN)
  • 作者单位

    State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun 130012, People's Republic of China;

    College of Communication Engineering, Jilin University, 2699 Qianjin Street, Changchun 130012, People's Republic of China;

    College of Information Technology, Jilin agricultural university, 2888 Xincheng Street, Changchun 130118, People's Republic of China;

    State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, 2699 Qianjin Street, Changchun 130012, People's Republic of China;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    POCKELS EFFECT; OPTICAL RECTIFICATION; SILICON; OPTOELECTRONIC INTEGRATION;

    机译:POCKELS效果;光学整流;硅;光电集成;

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