Rapid and accurate determination of transparency conductivity etchability patternability and manufacturability of ITO films

摘要

Abstract: We present a method for the rapid characterization of indium tin oxide (ITO) films. The method determines, from a simple optical measurement, the values of the refractive index (n) and extinction coefficient (k) from 190 to 1100 nm, film thickness, and energy band gap. Also we show that the spectra of the extinction coefficient can be correlated to the film's resistivity. This capability allows the determination of values for the resistivity of ITO films from a very fast and simple optical measurement.!11