MODELING AND SYSTEM DESIGN FOR ATMOSPHERIC PRESSURE CVD OF YSZ

摘要

Current yttria-stabilized zirconia (YSZ) electrolyte materials are inefficiently processed or lack sufficient quality. The highest quality material is currently produced by chemical vapor deposition (CVD) at reduced pressures. Such processes are capital and operationally intensive, and thus cannot meet cost goals. As a result, an atmospheric pressure CVD approach is being explored that would eliminate significant capital requirements such as vacuum systems, vessels, and fixturing, and potentially be a continuous process. The technique considered utilizes the unique characteristics of a stagnation point flow CVD reactor. In support of system design, a thermochemical study of the chloride CVD system has been performed. In addition, initial results of a one-dimensional model of a stagnation point flow CVD system for zirconia are reported. This information has been used in a conceptual design of an experimental reactor.