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delta-Bi2O3 thin films deposited on dense YSZ substrates by CVD method under atmospheric pressure for intermediate temperature SOFC applications

机译:在中压SOFC应用中,在大气压下通过CVD法在致密的YSZ衬底上沉积δ-Bi2O3薄膜

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Thin films of delta-Bi2O3 were grown on a dense Yttria Stabilized Zirconia (YSZ) substrate under atmospheric pressure by means of halide chemical vapour deposition (AP-HCVD) using BiI3 and O-2 as starting materials. X-ray diffraction (XRD) profiles confirm that above 700 degrees C delta-Bi2O3 film with a cubic structure is formed. When the delta-Bi2O3 is deposited at 850 degrees C, the < 111 > direction is preferred. Scanning electron microscopy (SEM) observation revealed that the surface of the film appeared granular and homogeneous with average grain size about 15 mu m. The thermal stability investigation shows that the delta-Bi2O3 films keep its fcc structure up to an annealing temperature of 350 degrees C, above which it transforms into the gamma-Bi2O3 bcc structure. (c) 2005 Elsevier B.V. All rights reserved.
机译:借助于BiI3和O-2作为起始材料,在卤化物化学气相沉积(AP-HCVD)下,在大气压力下,在致密的氧化钇稳定氧化锆(YSZ)衬底上生长delta-Bi2O3薄膜。 X射线衍射(XRD)曲线证实在700摄氏度以上形成了立方结构的δ-Bi2O3薄膜。当在850℃下沉积δ-Bi2 O 3时,优选<111>方向。扫描电子显微镜(SEM)观察表明,膜的表面看起来是颗粒状且均匀的,平均粒径为约15μm。热稳定性研究表明,δ-Bi2O3薄膜将其fcc结构保持在350摄氏度的退火温度下,在此温度以上,它转变为γ-Bi2O3bcc结构。 (c)2005 Elsevier B.V.保留所有权利。

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