Low-loss line-narrowed excimer oscillator for projection photolithography: experiments and simulation

摘要

Abstract: The short wavelength and high power of excimer lasers have made them attractive candidates as exposure sources for photolithography. Unfortunately, direct application of excimer lasers for microelectronic steppers is restricted by certain negative properties of the excimer laser radiation. This means that for the successful stepper's operation the radiation properties should be optimized. In this work the authors present the results of the optimization of the excimer laser characteristics for a deep-UV stepper.!