High Throughput Method to Fabricate Ordered Nano Dot Array on Various Plastic Films

摘要

In this paper, we propose a high throughput method to fabricate ordered metal nano dot array on a plastic film by combination of patterning by nano plastic forming, coating, annealing, and transferring to a plastic film. The effects of process parameters such as indentation load, annealing temperature on the formation of gold nano dot array and dot transfer ratio to a PDMS film are investigated. The results show that an ordered gold nano dot array is successfully formed on the pre-patterned substrate. The transfer of an ordered gold nano dot array to PDMS film is demonstrated.