A novel diffractive micro-optical modulator for mobile display applications

摘要

A diffractive optical modulator has been fabricated based on a micromachining process. Novel properties of its fast response time and dynamics were fully understood and demonstrated for the strong potentials in embedded mobile laser display. Bridged thin film piezo-actuators with so called open mirror diffraction structure has been designed. Optical level package also was achieved to successfully prove its display application qualities. Display circuits and driving logic were developed to finally confirm the single-panel laser display at a 240Hz VGA (640×480). With its efficiency of more than 75% and 13cc volume optical engine with the MEMS-based VGA resolution SOM showed 7 lm brightness at a 1.5W electrical power consumption. Detailed design principle, fabrication, packaging and performances of the invented SOM are described.