RF MEMS Technologies Fabricated Using Low Temperature Processing

摘要

Radio frequency microelectromechanical systems (RF MEMS) is an enabling technology for the miniaturization of future radar and communication systems. RF MEMS ohmic and capacitive switch performance and fabrication are discussed. Sandia National Laboratories' program in RF MEMS is motivated by defense and national security applications not currently being met by the private sector. Examples of fabricated switches and switched circuits under investigation at Sandia are presented.