AN ENHANCED BOILING SURFACE USING A MEMS TECHNOLOGY AND METHOD FOR FABRICATING THEREOF

摘要

PURPOSE: A high efficiency boiling surface using an MEMS(Micro Electro Mechanical System) process and a manufacturing method thereof are provided, in which a concave cavity is arrayed and operated as an active nucleation site on the surface on which boiling is generated. CONSTITUTION: The first metal thin film having a predetermined thickness is deposited on a glass substrate(10). A plurality of heat lines(12) and pads(13) are formed by carrying out a photolithography process on the first metal thin film. The first negative photoresist layer is coated on the resultant structure. The second metal thin film(16) is deposited on the resultant structure. The second structures(18) are formed on the second metal thin film by depositing and patterning the second negative photoresist layer. The second metal thin film is selectively etched. The cavities(20) are then completed by forming the first structures(15) by selectively etching the first negative photoresist layer.