首页> 外文会议>Conference on biomedical applications of micro- and nanoengineering IV and complex systems; 20081210-12; Melbourne(AU) >Rapid prototyping of microfluidic chips for use in droplet formation and In-vitro Compartmentalisation
【24h】

Rapid prototyping of microfluidic chips for use in droplet formation and In-vitro Compartmentalisation

机译:微流控芯片的快速原型设计,可用于液滴形成和体外隔离

获取原文
获取原文并翻译 | 示例

摘要

The combined use of film transparency masks and dry film resist has allowed a rapid prototyping of designs and structures in chips for droplet generation. Patterning of the film resist has produced channels with smooth vertical sidewalls. The minimum feature dimension, δ, was reduced by increasing the resolution and spacing of the pattern geometries in the film mask. For a single layer of resist (~35 μm thick), a minimum feature width of ~60 μm was obtained using 2040 dpi transparency masks, 40 μm for 5800 dpi transparency masks and 25 μm using a Cr mask of equal size/ spacing of features. A doubling of the spacing between features in a 2400 dpi masks resulted in an attainable feature size of ~40 μm. The minimum feature dimension increased exponentially with thickness of 5038 resist. Microfluidic chips which were fabricated in PMMA by this method have demonstrated controlled characteristics in the generation of oil droplets in water.
机译:膜透明掩膜和干膜抗蚀剂的组合使用可以快速设计芯片中的设计和结构以产生液滴。膜抗蚀剂的图案化产生了具有光滑的垂直侧壁的通道。最小特征尺寸δ通过增加胶片掩模中图案几何形状的分辨率和间距来减小。对于单层抗蚀剂(约35μm厚),使用2040 dpi透明掩模获得的最小特征宽度为〜60μm,对于5800 dpi透明掩模获得的最小特征宽度为40μm,使用等尺寸/特征间距的Cr掩模获得的最小特征宽度为25μm 。 2400 dpi掩模中特征之间的间距加倍导致可达到的特征尺寸约为40μm。最小特征尺寸随5038抗蚀剂的厚度呈指数增加。通过这种方法在PMMA中制造的微流体芯片在水中产生油滴方面表现出可控的特性。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号