A novel method for two-coordinate slope test with fiber optic sensor

摘要

The demand for incorporating sensor technology iinto the production environment is being driven by the increasing need to minimize manufacturing costs whilst simultaneously producing parts of high quality. A novel simple fiber-optic sensor based on the light beam reflection principle was presented for slopes measurement. With the optical probe arrangment like a wheel, the emitting single-mode finer (SMF) as the axle and eight receiving multi-mode fibers (MMF) as the spoke, the sensor can detect the surface slope with two-coordinate as weel as the offsets of displacement measurement can be compensated. The mathematical models were established based on the ABCD Law of Gussian beam transmission matrix optics and in the case of paraxial approximation. Simulations were performed for verifyig the proposed idea, and the preliminary experimental reuslts were obtained and its performance coincided with the simulation. The resolution of slopes test was better than 0.02 degree over +-30 degree, and the displacement measurement vertical resolution stayed within 0.1 micron, the lateral resolution can reach 8 micron. And with the futher development of this method, it can be absolutely used in complex surface measurement in Reverse Engineering.