Fabrication of two-layer diffractive optical element for single-beam and single-exposure fabrication of diamond-like photonic crystal

摘要

We report a new design and fabrication of an integrated two-layer phase mask for five-beam holographic fabrication of three-dimensional photonic crystal templates. The fabricated phase mask consists of two layers of orthogonally oriented gratings produced in a polymer. The vertical spatial separation between two layers produces a phase difference among diffractive laser beams, which has enabled a holographic fabrication of diamond-like photonic crystal templates through single-beam and single-exposure process. The reported method simplifies the fabrication of photonic crystals and is amendable for massive production and chip-scale integration of three-dimensional photonic structures.