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Effects of thermal annealing on film quality of InAs-On-Insulator structures fabricated by Smart Cut method

机译：热退火对Smart Cut法制备的绝缘体上InAs结构膜质量的影响

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We study the characteristics of InAs-On-Insulator (InAs-OI) substrates fabricated by the Smart Cut method, which combines wafer bonding with splitting by H

机译：我们研究了通过Smart Cut方法制造的InAs-In-Insulator（InAs-OI）衬底的特性，该方法将晶片键合与H分裂相结合

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《Compound Semiconductor Week》|2019年|1-1|共1页
会议地点 Nara(JP)
作者
Kei Sumita; Jun Takeyasu; Kimihiko Kato; Mitsuru Takenaka; Shinichi Takagi;
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The University of Tokyo Japan;

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1. Fabrication of thin body InAs-on-insulator structures by Smart Cut method with H~+ implantation at room temperature [J] . Sumita Kei, Kato Kimihiko, Takenaka Mitsuru, Japanese journal of applied physics . 2019,第SB期

机译：室温下H〜+注入的Smart Cut法制备绝缘体上InAs薄结构
2. Effects of deposition method and conditions for IGZO film and thermal annealing on composite film quality, surface roughness, microstructural defects, and electrical properties of Ti/IGZO/graphene/polyimide specimens [J] . Chang Chang-Shuo, Li Tse-Chang, Tsai Yi-Chan, Journal of Alloys and Compounds: An Interdisciplinary Journal of Materials Science and Solid-state Chemistry and Physics . 2018,第期

机译：IGZO薄膜沉积方法和条件对复合薄膜质量，表面粗糙度，微观结构缺陷和Ti / IgZO /石墨烯/聚酰亚胺样品的电学性能的影响
3. Annealing temperature dependent structures and properties of ferromagnetic Fe_3Si films fabricated by resistive thermal evaporation [J] . Jing Xie, Quan Xie, Rui Ma, Journal of materials science . 2018,第2期

机译：电阻热蒸发法制备的Fe_3Si铁磁薄膜的温度依赖性退火结构和性能
4. Effects of thermal annealing on film quality of InAs-On-Insulator structures fabricated by Smart Cut method [C] . Kei Sumita, Jun Takeyasu, Kimihiko Kato, Compound Semiconductor Week . 2019

机译：热退火对智能切割法制造的内部绝缘结构薄膜质量的影响
5. Effect of In Situ Thermal Annealing Process on Structural, Optical and Electrical Properties of CdSCdTe Thin-Film Solar Cells Fabricated by Pulsed Laser Deposition [D] . Al-mebir, Alaa Ayad Khedhair 2015

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6. Perpendicular Structure Formation of Block Copolymer Thin Films during Thermal Solvent Vapor Annealing: Solvent and Thickness Effects [O] . Qiuyan Yang, Katja Loos 2017

机译：溶剂蒸汽退火过程中嵌段共聚物薄膜的垂直结构形成：溶剂和厚度的影响
7. Oxygen-Annealing Effects on Superconducting Properties of ErBa2Cu3Oy Thin Films Fabricated by Pulsed Laser Deposition Method [O] . Shigeru Horii, Masashi Mukaida, Yusuke Ichino, 2004

机译：氧气退火对脉冲激光沉积法制造的Erba2Cu3oy薄膜超导性能的影响

Effects of thermal annealing on film quality of InAs-On-Insulator structures fabricated by Smart Cut method

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