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THE ROLE OF BORON ON THE DEPOSITION DOMAIN FOR VAPOR PHASE SYNTHESIS OF DIAMOND FILMS

机译：硼在沉积相上对金刚石薄膜气相合成的作用

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来源
《Carbon '01》|2001年|p.1-2|共2页
会议地点 Lexington KY(US);Lexington KY(US)
作者
G. Bhimarasetti; R. C. Mani; M. K. Sunkara;
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作者单位

Department of Chemical Engineering, University of Louisville, Louisville, KY 40292, USA;

Department of Chemical Engineering, University of Louisville, Louisville, KY 40292, USA;

Department of Chemical Engineering, University of Louisville, Louisville, KY 40292, USA;

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会议组织
原文格式 PDF
正文语种 eng
中图分类第Ⅳ族非金属元素（碳和硅）及其化合物;
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1. Surface morphology and electrical properties of boron-doped diamond films synthesized by microwave-assisted chemical vapor deposition using trimethylboron on diamond (100) substrate [J] . Tsubota T., Fukui T. Diamond and Related Materials . 2000,第7期

机译：微波辅助化学气相沉积三甲基硼在金刚石（100）衬底上合成的掺硼金刚石薄膜的表面形态和电性能
2. Surface morphology and electrical properties of boron-doped diamond films synthesized by microwave-assisted chemical vapor deposition using trimethylboron on diamond (100) substrate [J] . Tsubota T., Fukui T., Saito T., Diamond and Related Materials . 2000,第7aJul期

机译：微波辅助化学气相沉积三甲基硼在金刚石（100）衬底上合成的掺硼金刚石薄膜的表面形态和电性能
3. Role of atomic hydrogen density and energy in low power chemical vapor deposition synthesis of diamond films [J] . Mills R, Sankar J, Voigt A, Thin Solid Films . 2005,第1a2期

机译：氢原子密度和能量在金刚石薄膜低功率化学气相沉积合成中的作用
4. Roles of boron in growth of diamond grains in ultrananocrystalline diamond/hydrogenated amorphous carbon composite films prepared by pulsed laser deposition [C] . Shinya Ohmagari, Yuki Katamune, Hikaru Ichinose, Symposium on diamond electronics and biotechnology-fundamentals to applications V . 2012

机译：硼在脉冲激光沉积中制备的超晶金刚石/氢化非晶碳复合膜中金刚石晶粒生长中的作用
5. Synthesis and characterization of diamond thin films by microwave plasma-enhanced chemical vapor deposition (MPECVD). [D] . Chou, Shih-Feng. 2005

机译：通过微波等离子体增强化学气相沉积（MPECVD）合成和表征金刚石薄膜。
6. Synthesis of ultrasmooth nanostructured diamond films by microwave plasma chemical vapor deposition using a He/H2/CH4/N2 gas mixture [O] . S. Chowdhury, Damon A. Hillman, Shane A. Catledge, -1

机译：使用He / H2 / CH4 / N2气体混合物通过微波等离子体化学气相沉积法合成超光滑纳米结构金刚石膜
7. Synthesis and characterization of microcrystalline diamond to ultrananocrystalline diamond films via Hot Filament Chemical Vapor Deposition for scaling to large area applications [O] . E.M.A. Fuentes-Fernandez, J.J. Alcantar-Peña, G. Lee, 2016

机译：通过热丝化学化学气相沉积来合成微晶金刚石对超晶金刚石薄膜的缩放，以缩放大面积应用

THE ROLE OF BORON ON THE DEPOSITION DOMAIN FOR VAPOR PHASE SYNTHESIS OF DIAMOND FILMS

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