SUBSTRATE HOLDER FOR VAPOR-PHASE DIAMOND SYNTHESIS AND METHOD OF VAPOR-PHASE DIAMOND SYNTHESIS

摘要

PROBLEM TO BE SOLVED: To provide a substrate holder for vapor-phase diamond synthesis which can hold various types of substrates and can uniformly keep the plasma distribution in the vapor-phase synthesis of diamond using microwaves; and a vapor-phase diamond synthesis method effectively using the substrate holder.;SOLUTION: A concave substrate-storing part 25 for placing a substrate 20 is formed on the upper surface of a holder body 21. An orifice 22, which is a hole to evacuate a reaction gas, is made at the center of the substrate-storing part 25. From the orifice 22, eight grooves 23 are radially formed, and concentrically placed circular grooves 26a-26d are made at the bottom of the substrate-storing section 25. In addition, a member 24 having a curved cross section is set on the outer part of the substrate-storing part 25 of the substrate holder body 21.;COPYRIGHT: (C)2004,JPO&NCIPI