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Formation mechanism of self-assembled polarization-dependent periodic nanostructures in β-Ga2O3

机译:β-Ga2O3中自组装极化相关的周期性纳米结构的形成机理

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摘要

We have successfully observed self-assembled periodic nanostructures inside Si single crystal and GaP crystal, by the femtosecond double-pulse irradiation. These results experimentally indicate that the self-assembly of the periodic nanostructures inside semiconductors triggered by ultrashort pulses irradiation are possibly associated with a direct or an indirect band gap. More recently we have also empirically classified the photoinduced bulk nanogratings into the following three types: (1) structural deficiency, (2) compressed structure, (3) partial crystallization. We have still a big question about what material properties are involved in the bulk nanograting structure formation. In this study, to expand the selectivity of the material for bulk nanograting formation, we have employed β-Ga_2O_3 crystals (indirect bandgap Eg ~ 4.8 eV) as a sample for femtosecond laser irradiation. The nanograting structure inside β-Ga_2O_3 crystal was aligned perpendicular to the laser polarization direction. Such phenomenon is similar to the nanograting in SiO_2 glass (Eg ~ 9 eV). Moreover, to clarify the band structure, we have also investigate the photoinduced structure in Sn doped β-Ga_2O_3 crystals, which exhibit direct bandgap according to the first principle calculation.
机译:我们已经通过飞秒双脉冲辐照成功地观察到了Si单晶和GaP晶体内部的自组装周期性纳米结构。这些结果实验表明,由超短脉冲辐照触发的半导体内部周期性纳米结构的自组装可能与直接或间接带隙相关。最近,我们还根据经验将光诱导的本体纳米光栅分为以下三种类型:(1)结构缺陷,(2)压缩结构,(3)部分结晶。关于本体纳米光栅结构形成中涉及哪些材料属性,我们仍然存在很大的问题。在这项研究中,为扩大材料的选择性,以形成块状纳米光栅,我们采用了β-Ga_2O_3晶体(间接带隙Eg〜4.8 eV)作为飞秒激光辐照的样品。 β-Ga_2O_3晶体内部的纳米光栅结构垂直于激光偏振方向排列。这种现象类似于SiO_2玻璃中的纳米光栅(Eg〜9 eV)。此外,为阐明能带结构,我们还研究了掺Sn的β-Ga_2O_3晶体中的光诱导结构,该晶体根据第一原理计算显示出直接的带隙。

著录项

  • 来源
    《Laser-based micro- and nanoprocessing XII》|2018年|105201J.1-105201J.7|共7页
  • 会议地点 San Francisco(US)
  • 作者单位

    Depertment of Material Chemistry, Graduate School of Engineering, Kyoto University, Kyoto 615-8510, Japan;

    Depertment of Material Chemistry, Graduate School of Engineering, Kyoto University, Kyoto 615-8510, Japan;

    Depertment of Material Chemistry, Graduate School of Engineering, Kyoto University, Kyoto 615-8510, Japan;

    Depertment of Material Chemistry, Graduate School of Engineering, Kyoto University, Kyoto 615-8510, Japan;

    Depertment of Material Chemistry, Graduate School of Engineering, Kyoto University, Kyoto 615-8510, Japan;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    laser processing; femtosecond process; semiconductor; nanograting; periodic nanostructure;

    机译:激光加工;飞秒过程;半导体;纳米光栅周期性纳米结构;

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