Automated visual quality evaluation of CVD film

摘要

Abstract: This study describes the implementation and performance of a new image analysis algorithm, ALOET, as applied to automatically distinguishing between acceptable and unacceptable chemical vapor deposition (CVD) diamond film. ALOET is a texture feature which measures the homogeneity of the edge orientations in a local window, and which is useful in differentially characterizing large and small polycrystalline structures. The analysis in this study includes a performance metric for film quality evaluation, numerical and visual performance results, and an example analytical model for determining the algorithm's control parameters. !9