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Evaluation of ordering of directed self-assembly of block copolymers with pre-patterned guides for bit patterned media

机译：用位图介质的预构图导板评估嵌段共聚物的定向自组装顺序

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Bit patterned media (BPM) is a promising candidate for next-generation magnetic recording media beyond 2.5 Tb/in2.To realize such high-density patterned media, directed self-assembling (DSA) technology is a possible solution to formfine dots. In order to

机译：位图样介质（BPM）是2.5 Tb / in2以上的下一代磁记录介质的有希望的候选者。要实现这种高密度图样介质，定向自组装（DSA）技术是形成精细点的一种可行解决方案。为了

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《Alternative lithographic technologies IV.》|2012年|P.0S.1-0S.8|共8页
会议地点 San Jose CA(US)
作者
Takeshi Okino; Takuya Shimada; Akiko Yuzawa; Ryosuke Yamamoto; Naoko Kihara; Yoshiyuki Kamata; Akira Kikitsu;
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作者单位

Toshiba Corp. (Japan);

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会议组织
原文格式 PDF
正文语种 eng
中图分类微电子学、集成电路（IC）;微电子学、集成电路（IC）;
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1. Directed self-assembly of block copolymers for use in bit patterned media fabrication [J] . Rhys Alun Griffiths, Aled Williams, Chloe Oakland, Journal of Physics, D. Applied Physics: A Europhysics Journal . 2013,第50期

机译：用于位图介质制造的嵌段共聚物的定向自组装
2. Directed Self-Assembly of Block Copolymer for Bit Patterned Media with Areal Density of 1.5 Teradot/Inch2and Beyond [J] . XiaoMinYang, ShuaigangXiao, YautzongHsu, Journal of nanomaterials . 2013,第1期

机译：区域密度为1.5 Teradot / Inch2及更高的位型介质的嵌段共聚物的定向自组装
3. Directed Self-Assembly of Block Copolymer for Bit Patterned Media with Areal Density of 1.5 Teradot/Inch2and Beyond [J] . XiaoMinYang, ShuaigangXiao, YautzongHsu, Journal of nanomaterials . 2013,第1期

机译：区域密度为1.5 Teradot / Inch2及更高的位型介质的嵌段共聚物的定向自组装
4. SRAM, NAND, DRAM contact hole patterning using block copolymer directed self-assembly guided by small topographical templates [C] . Bao Xin-Yu, He Yi, Bencher Christopher, 2011 IEEE International Electron Devices Meeting . 2011

机译：SRAM，NAND，DRAM接触孔图案化，使用嵌段共聚物指导的自组装，由小形貌模板指导
5. Directed self-assembly of block copolymers and ternary block copolymer/homopolymer blends on chemically patterned surfaces into device-oriented geometries. [D] . Stoykovich, Mark P. 2007

机译：嵌段共聚物和三元嵌段共聚物/均聚物共混物在化学图案化表面上的定向自组装成面向装置的几何形状。
6. Directed self-assembly of block copolymer films on atomically-thin graphene chemical patterns [O] . Tzu-Hsuan Chang, Shisheng Xiong, Robert M. Jacobberger, -1

机译：原子薄石墨烯化学图案上嵌段共聚物薄膜的定向自组装
7. Directed self-assembly of block copolymers for use in bit patterned media fabrication [O] . Griffiths Rhys, Williams Aled, Oakland Chloë, 2013

机译：用于位图介质制造的嵌段共聚物的定向自组装

Evaluation of ordering of directed self-assembly of block copolymers with pre-patterned guides for bit patterned media

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