ANALYSIS AND MITIGATION OF SAMPLE HEATING IN THERMOREFLECTANCE MICROSCOPY

摘要

The illumination of a sample when imaged by thermore-flectance thermal microscopy may cause significant heating of the surface. Nonlinearities in the performance of the system being imaged may lead to large measurement induced errors in the observed temperature field. Analytical expressions are presented to estimate the temperature rise and heat flux in a sample. Spatially filtered thermo-reflectance microscopy is introduced as a technique to significantly reduce the incident heat flux without loss of spatial resolution.