LIQUID PACKAGED MEMS TUNABLE CAPACITORS WITH FAST RESPONSE TIMES AND REDUCED VIBRATION SENSITIVITY

摘要

A new developed liquid packaging approach dramatically improves the performance of MEMS tunable capacitors. Previous devices suffered from slow response times due to mechanical ringing and poor vibration immunity. By packaging the device in the appropriate liquid, critical damping has been achieved and response times as fast as 50ms have been demonstrated.