The Iris AO S163-X, a 489 actuator, 163-piston/tip/tilt-segment MEMS DM

摘要

Iris AO has been developing microelectromechanical systems (MEMS) based deformable mirrors (DM) for a number of years. This paper presents a review of the basic segmented DM design and shows test results of a 111-actuator, 37-piston/tip/tilt (PTT) segment DM. A 489-actuator 163-PTT-segment design is described as well as progress towards the fabrication of the device. A view to the future is shown by describing path-finding research towards 3000-actuator, 1000-PTT-segment DMs.