Optimization of PDMS network for a fast response and sensitive actuation material applied in a MEMS spatial light modulator

摘要

The cross-linked networks of linear vinyl-terminated poly(dimethylsiloxane) (PDMS) with trimethylsiloxy-terminated methyhydrosiloxane-dimethylsiloxane copoly-mer (cross-linker) were investigated by tuning the cross-linker concentration, the chain length of linear PDMS and the functionality of the cross-linker. Response time and elastic modulus of the cross-linked PDMS elastomer were characterized by home-made measurement systems and analyzed based on their network topologies. An optimized PDMS elastomer, which has response time of 9 us and elastic modulus of 601 kPa, was utilized as the actuation material in a MEMS spatial light modulator (SLM). The fabrication processes were described. This polymer based SLM has shown fast response time (9 μs) and successfully diffracted light into higher orders with 84% first-order diffraction efficiency.