A Testing Method of Uncoupling MEMS Gyroscope’s Scale Factor and Input Axis Misalignment Angle

摘要

The big input axis misalignment angle has some disadvantages in the accurate test of MEMS gyroscope parameters. Its influence on the error of scale factor test and input axis misalignment test is studied. An uncouple principle is proposed, a precise mathematic model is established, and then a set of uncouple test equipment and experiment are designed. The findings of half-physics simulation show that this method can realize uncoupling of scale factor and input axis misalignment and can make the test precision be free from the influence of the input axis misalignment value. This method can improve the test accurate and especially be suitable to the MEMS gyroscopes with big input axis misalignment angles.