The Optimized Design of Accelerometer for the UV-LIGA Process

摘要

An optimized design of accelerometer was presented for the UV-LIGA process in this paper. Based on the FEA simulation of mechanical property and developing process, traditional comb-finger accelerometer was optimized for UV-LIGA process. The Finite Element analysis (FEA) result of mechnical property demonstrates that the novel design offer the 2.96 times in sensitivity. Moreover, novel structure makes the hydrodynamics property during the developing process much better than that of traditional structure. It is great characters for the precision developing result and quality manufacture.