Multi-layer graphene interconnect

摘要

Graphene layers are investigated as an alternative material to tackle the interconnect scaling challenges. In this work we use large area synthetic graphene layers and evaluate layer properties in terms of sheet resistance and mean free path. The resistance of the multilayer graphene is about 60% lower compared to the single layer graphene. Mean free path yielded a maximum value of ¿¿¿60 nm for single layer and ¿¿¿27 nm for multilayer graphene at room temperature in ambient conditions. The sheet resistance can be reduced by 30% by applying acidic doping agents. Finally, the contact resistivity reduced by 50% by moving away from top to side contacts.