Integration of Pb(Zr,Ti)O3 thin films with photo-sensitive polymer

摘要

This paper reports a batch fabrication process combining piezoelectric Pb(Zr,Ti)O (PZT) thin films with photosensitive polymer SU-8. Fabricated PZT/SU-8 structure shows small stiffness and less brittleness. In addition, the piezoelectric characteristics are equivalent to conventional PZT thin films on Si substrates. From the result of actuation experiments of cantilevers, the PZT/SU-8 structures show excellent flexibility. This allows 1-mm long cantilever to actuate at bending angle over 90 ° without breaking.