Application of PVC to significantly improve the success rate in locating trench defect using FIB after electrical failure localization

机译：PVC在电气故障定位后使用FIB显着提高沟槽缺陷定位成功率的应用

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The paper outlines the application of passive voltage contrast (PVC) to significantly improve the success rate of 100% in locating trench defect especially gate oxide rupture using FIB after electrical failure localization. With this methodology, it enhances analysis throughput and accuracy without the need of having high resolution FIB.

机译：本文概述了无源电压对比（PVC）的应用，可显着提高电缺陷定位后使用FIB定位沟槽缺陷（特别是栅极氧化物断裂）的成功率100％。通过这种方法，无需使用高分辨率FIB，即可提高分析通量和准确性。

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《2013 20th IEEE International Symposium on the Physical amp; Failure Analysis of Integrated Circuits》|2013年|103-106|共4页
会议地点 Suzhou(CN)
作者
Zakaria Nurhanani;
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作者单位

Infineon Technologies (Kulim) Sdn.Bhd., Lot 10 11, Industrial Zone Phase II, Kulim Hi-Tech Park, 09000, Kedah, Malaysiac;

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正文语种 eng
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机译：用于检测和定位土工膜失效的电阻率技术的性能

Application of PVC to significantly improve the success rate in locating trench defect using FIB after electrical failure localization

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