Design simulation and theoretical analysis of glucose sensing using Polysilicon-based CMOS micromachined Piezoresistive Microcantilever

摘要

This work has focused on the design simulation analysis of a Polysilicon-based CMOS micromachined Piezoresistive Microcantilever beam for glucose sensing application. In principle, adsorption of glucose on a functionalized surface of the microfabricated cantilever will cause a surface stress and consequently the cantilever bending. In this paper, the microcantilever beam is constructed and bending analysis is performed so that the beam tip deflection could be predicted. The device model was simulated using CoventorWare^TM, a commercial finite element analysis (FEA) tool designed specifically for MEMS applications. The structural variation of the piezoresistors designs on cantilever beam is also considered to increase the sensitivity of the microcantilevers sensor since the forces involved is very small. Besides, the mechanic characteristics of the microcantilever beam such as displacement were observed based on transient response characteristics usinganalytical method and simulation method with Matlab Simulink. We observed that the best output response which have fastest response, low overshoot and low steady state error is when d=3.30 and k=3.