Effect of Al and N doping on structural and optical properties of sol-gel derived ZnO thin films

摘要

In this work, ZnO, N-doped ZnO(NZO), Al-doped ZnO(AZO) and Al, N-doped ZnO(ANZO) thin films were prepared by the sol-gel spin-coating method based on zinc acetate dihydrate(CH3COO)2Zn·2H2O, Aluminium acetate (C4H7AlO5), Ammonium acetate(CH3COONH4), absolute ethanol (C2H5OH) and diethanolamine ((HOCH2CH2)2NH, DEA). All films were spin-coated on borosilicate substate for several coating repetition followed by annealing process at 550 °C for 4 hr in air. The structural properties and surface morphologies of films were characterized by X-ray diffraction (XRD) and Field Emission Scanning Electron Microscope (FE-SEM). The optical properties of the films were interpreted from their transmission spectra using UV-VIS spectrophotometer.