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Flow modeling of die attach process and the optimization of process parameters in advance packaging

机译:芯片组装过程的流程建模和预先包装中的过程参数优化

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This paper presents a new numerical model to characterize the die attach process in the advance packaging. With its successful application on a 5 mm by 5 mm with 70um thickness die attached to the substrate, final fillet shape of the die attach material is predicted for various process conditions. Focuses have been given on the die attach material over flow on the die top surface. The contamination on the die top surface may cause failures in the subsequent processes. The simulation results were compared with the experiment. Good match was obtained. Moreover, process window for a given amount die attach material was established through the simulation and the corresponding bonding force that will not cause die attach material over flow was predicted. Key advantage of this numerical study is to give the insights into process parameters and provide initial process window to prevent die attach over flow.
机译:本文提出了一个新的数值模型,以表征先进包装中的芯片贴装过程。随着其成功地应用在5mm x 5mm的厚度为70um的芯片上,该芯片可以在各种工艺条件下最终成型。已经着重研究了在芯片顶面上流动的芯片附着材料。模具顶面上的污染可能会导致后续工艺失败。仿真结果与实验进行了比较。获得了良好的匹配。此外,通过模拟建立了给定数量的芯片附着材料的工艺窗口,并预测了不会导致芯片附着材料溢出的相应结合力。这项数值研究的主要优点是可以深入了解工艺参数并提供初始工艺窗口,以防止管芯附着过度。

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