Visual Modeling and Design of Microelectromechanical System (MEMS) Transducers

摘要

Microelectromechanical systems (MEMS) integrates miniaturized mechanical structures with electronics to extend the benefits of planar integrated circuit technology to a broader class of systems. To realize the potential and growth of MEMS, new modeling, analysis, and design techniques are required to address both mechanics and electronics. The close proximity of the integration of mechanical and electrical domains within the small dimensions associated with very large scale integration (VLSI) presents new energy-coupling issues. The behavior of the overall system is not the simple concatenation of separate mechanical and electrical behaviors, but the simultaneous combination of mechanical and electrical behaviors. In this paper, we address initial design capture and system conceptualization of microelectromechanical system transducers based on visual modeling and design. We present the concepts of structured topological design, circuit-level branch constitutive differential and algebraic equations (DAEs) characterization, and design-by-direct-manipulation.